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sci-6.2-Effect of peak current on the microstructure, mechanical properties and tribological behavior of MoxN coatings deposited by high power impulse magnetron sputtering

渚�(l谩i)婧�:  鑿尟鍎€鍣�   浣滆€�:  绠＄悊鍝�   鏅�(sh铆)闁�:  2024-08-01  榛�(di菐n)鎿�:   589 娆�


sci-6.2-Effect of peak current on the microstructure, mechanical properties and tribological behavior of MoxN coatings deposited by high power impulse magnetron sputtering.pdf


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